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ESXi 5.1 on MFSYS25/MFS5000SI with two processor E5420

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Hello I hope for your help. I have a Modular Server MSYS25, there are blades MS5000SI dual processor E5420. I want to install ESXi 5.1, but during the installation I receive a warning:

<HARDWARE_VIRTUALIZATION WARNING: Hardware virtualization is not a feature of the CPU, or is not enabled in BIOS>
In the BIOS enabled Intel VT. Did a hard reset and re-configure the BIOS, no result. Tell me, what is the reason?
P.S. Firmware latest version. Sorry, i'm very bad speak englilsh

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